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A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology
A thermopile device with sub-wavelength hole array (SHA) is numerically and experimentally investigated. The infrared absorbance (IRA) effect of SHAs in active area of the thermopile device is clearly analyzed by the finite-difference time-domain (FDTD) method. The prototypes are manufactured by the...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7795074/ https://ncbi.nlm.nih.gov/pubmed/33383920 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21010180 |
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