Q-Factor Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonator by Phononic Crystal-Reflector Composite Structure

Thin-film piezoelectric-on-silicon (TPoS) microelectromechanical (MEMS) resonators are required to have high Q-factor to offer satisfactory results in their application areas, such as oscillator, filter, and sensors. This paper proposed a phononic crystal (PnC)-reflector composite structure to impro...

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Bibliografske podrobnosti
izdano v:Micromachines (Basel)
Main Authors: Liu, Jiacheng, Workie, Temesgen Bailie, Wu, Ting, Wu, Zhaohui, Gong, Keyuan, Bao, Jingfu, Hashimoto, Ken-ya
Format: Artigo
Jezik:Inglês
Izdano: MDPI 2020
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Article
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC7767028/
https://ncbi.nlm.nih.gov/pubmed/33419352
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11121130
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