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Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
In atomic force microscopes (AFM) a resonantly excited, micro-machined cantilever with a tip is used for sensing surface-related properties. When targeting the integration of AFMs into vacuum environments (e.g., for enhancing the performance of scanning electron microscopes), a tuneable Q-factor of...
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| Udgivet i: | Sensors (Basel) |
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| Main Authors: | , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2018
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6263779/ https://ncbi.nlm.nih.gov/pubmed/30423949 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18113842 |
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