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Clean-Room Lithographical Processes for the Fabrication of Graphene Biosensors
This work is on developing clean-room processes for the fabrication of electrolyte-gate graphene field-effect transistors at the wafer scale for biosensing applications. Our fabrication process overcomes two main issues: removing surface residues after graphene patterning and the dielectric passivat...
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| Publicado no: | Materials (Basel) |
|---|---|
| Main Authors: | , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7765539/ https://ncbi.nlm.nih.gov/pubmed/33334060 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13245728 |
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