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Clean-Room Lithographical Processes for the Fabrication of Graphene Biosensors

This work is on developing clean-room processes for the fabrication of electrolyte-gate graphene field-effect transistors at the wafer scale for biosensing applications. Our fabrication process overcomes two main issues: removing surface residues after graphene patterning and the dielectric passivat...

Disgrifiad llawn

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Cyhoeddwyd yn:Materials (Basel)
Prif Awduron: Cabral, Patrícia D., Domingues, Telma, Machado, George, Chicharo, Alexandre, Cerqueira, Fátima, Fernandes, Elisabete, Athayde, Emília, Alpuim, Pedro, Borme, Jérôme
Fformat: Artigo
Iaith:Inglês
Cyhoeddwyd: MDPI 2020
Pynciau:
Mynediad Ar-lein:https://ncbi.nlm.nih.gov/pmc/articles/PMC7765539/
https://ncbi.nlm.nih.gov/pubmed/33334060
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13245728
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