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Silicon-Carbide (SiC) Nanocrystal Technology and Characterization and Its Applications in Memory Structures

Colloidal cubic silicon-carbide nanocrystals have been fabricated, characterized, and introduced into metal–insulator–semiconductor and metal–insulator–metal structures based on hafnium oxide layers. The fabricated structures were characterized through the stress-and-sense measurements in terms of d...

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Detalhes bibliográficos
Publicado no:Nanomaterials (Basel)
Main Authors: Mazurak, Andrzej, Mroczyński, Robert, Beke, David, Gali, Adam
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7761177/
https://ncbi.nlm.nih.gov/pubmed/33260489
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano10122387
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