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A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode
Disc gyroscope manufactured through microelectromechanical systems (MEMS) fabrication processes becomes one of the most critical solutions for achieving high performance. Some reported novel disc constructions acquire good performance in bias instability, scale factor nonlinearity, etc. However, ant...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7760768/ https://ncbi.nlm.nih.gov/pubmed/33271830 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11121071 |
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