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Thermal Stability of Titanium Contacts to MoS(2)

Thermal annealing of Ti contacts is commonly implemented in the fabrication of MoS(2) devices; however, its effects on interface chemistry have not been previously reported in the literature. In this work, the thermal stability of titanium contacts deposited on geological bulk single crystals of MoS...

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Veröffentlicht in:ACS Appl Mater Interfaces
Hauptverfasser: Freedy, Keren M., Zhang, Huairuo, Litwin, Peter M., Bendersky, Leonid A., Davydov, Albert V., McDonnell, Stephen
Format: Artigo
Sprache:Inglês
Veröffentlicht: 2019
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7717568/
https://ncbi.nlm.nih.gov/pubmed/31468959
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsami.9b08829
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