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Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams

This work explores a new technique for the out-of-plane patterning of metal thin films prefabricated on the surface of a polymer substrate. This technique is based on an ion-beam-induced material modification in the bulk of the polymer. Effects of subsurface and surface processes on the surface morp...

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Bibliografske podrobnosti
izdano v:Beilstein J Nanotechnol
Main Authors: Chiriaev, Serguei, Tavares, Luciana, Adashkevich, Vadzim, Goszczak, Arkadiusz J, Rubahn, Horst-Günter
Format: Artigo
Jezik:Inglês
Izdano: Beilstein-Institut 2020
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC7653337/
https://ncbi.nlm.nih.gov/pubmed/33194518
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.11.151
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