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Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams
This work explores a new technique for the out-of-plane patterning of metal thin films prefabricated on the surface of a polymer substrate. This technique is based on an ion-beam-induced material modification in the bulk of the polymer. Effects of subsurface and surface processes on the surface morp...
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| Veröffentlicht in: | Beilstein J Nanotechnol |
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| Hauptverfasser: | , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Beilstein-Institut
2020
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7653337/ https://ncbi.nlm.nih.gov/pubmed/33194518 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.11.151 |
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