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Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy
We report on a developed micromachined silicon platform for the precise assembly of 2D multilayer Laue lenses (MLLs) for high-resolution X-ray microscopy. The platform is 10 × 10 mm(2) and is fabricated on ~500 µm thick silicon wafers through multiple steps of photolithography and deep reactive-ion...
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| Udgivet i: | Micromachines (Basel) |
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| Main Authors: | , , , , , , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2020
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7602850/ https://ncbi.nlm.nih.gov/pubmed/33076523 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11100939 |
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