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Comparative Study of Pd/B(4)C X-ray Multilayer Mirrors Fabricated by Magnetron Sputtering with Kr and Ar Gas
Ultrathin Pd/B(4)C multilayers are suitable X-ray mirrors working at the photon energy region of 7–20 keV. To further improve the layer structure, Pd/B(4)C multilayers with a d-spacing of 2.5 nm were fabricated by magnetron sputtering using the heavy noble gas Kr and compared with the conventional o...
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| Veröffentlicht in: | Materials (Basel) |
|---|---|
| Hauptverfasser: | , , , , , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2020
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7600154/ https://ncbi.nlm.nih.gov/pubmed/33050660 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13204504 |
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