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Metal-Semiconductor-Metal GeSn Photodetectors on Silicon for Short-Wave Infrared Applications
Metal-semiconductor-metal photodetectors (MSM PDs) are effective for monolithic integration with other optical components of the photonic circuits because of the planar fabrication technique. In this article, we present the design, growth, and characterization of GeSn MSM PDs that are suitable for p...
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| Publicat a: | Micromachines (Basel) |
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| Autors principals: | , , , , , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2020
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7570010/ https://ncbi.nlm.nih.gov/pubmed/32839407 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11090795 |
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