Aluminum Oxide Nanoparticle Films Deposited from a Nonthermal Plasma: Synthesis, Characterization, and Crystallization

[Image: see text] Aluminum oxide, both in amorphous and crystalline forms, is a widely used inorganic ceramic material because of its chemical and structural properties. In this work, we synthesized amorphous aluminum oxide nanoparticles using a capacitively coupled nonthermal plasma utilizing trime...

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Foilsithe in:ACS Omega
Main Authors: Li, Zhaohan, Wray, Parker R., Su, Magel P., Tu, Qiaomiao, Andaraarachchi, Himashi P., Jeong, Yong Jin, Atwater, Harry A., Kortshagen, Uwe R.
Formáid: Artigo
Teanga:Inglês
Foilsithe: American Chemical Society 2020
Rochtain Ar Líne:https://ncbi.nlm.nih.gov/pmc/articles/PMC7528284/
https://ncbi.nlm.nih.gov/pubmed/33015493
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsomega.0c03353
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