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Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature
A surface acoustic wave (SAW) device with an aluminum nitride (AlN) composite structure of Al(2)O(3)/IDTs/AlN/Metal/Si was proposed for sensing at extreme high-temperature in this work. Optimization allowing determination of optimal design parameters for SAW devices was conducted using the typical c...
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| Publicat a: | Sensors (Basel) |
|---|---|
| Autors principals: | , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2020
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7435944/ https://ncbi.nlm.nih.gov/pubmed/32726902 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20154160 |
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