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Chemical carving lithography with scanning catalytic probes
This study introduces a new chemical carving technique as an alternative to existing lithography and etching techniques. Chemical carving incorporates the concept of scanning probe lithography and metal-assisted chemical etching (MaCE). A catalyst-coated probe mechanically scans a Si substrate in a...
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| Опубликовано в: : | Sci Rep |
|---|---|
| Главные авторы: | , , , |
| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
Nature Publishing Group UK
2020
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| Предметы: | |
| Online-ссылка: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7415144/ https://ncbi.nlm.nih.gov/pubmed/32770060 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-70407-1 |
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