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Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane
This paper reports on micro-fabricated pressure sensors based on a thin metallic glass membrane. The Pd(66)Cu(4)Si(30) metallic glass material is deposited successfully by a sputter technique. An amorphous feature of the deposited film is confirmed by high resolution transmission electron microscopy...
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| Published in: | Sci Rep |
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| Main Authors: | , , , , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
Nature Publishing Group UK
2020
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7308269/ https://ncbi.nlm.nih.gov/pubmed/32572097 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-67150-y |
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