Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition

The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic pr...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Belianinov, Alex, Burch, Matthew J., Ievlev, Anton, Kim, Songkil, Stanford, Michael G., Mahady, Kyle, Lewis, Brett B., Fowlkes, Jason D., Rack, Philip D., Ovchinnikova, Olga S.
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7281202/
https://ncbi.nlm.nih.gov/pubmed/32455865
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11050527
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