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Investigation on Threshold Voltage Adjustment of Threshold Switching Devices with HfO(2)/Al(2)O(3) Superlattice on Transparent ITO/Glass Substrate
Threshold voltage adjustment in threshold switching (TS) devices with HfO(2)/Al(2)O(3) superlattice (by means of changing the cycle ratio of HfO(2) to Al(2)O(3) in atomic layer deposition) is investigated to implement a transparent cross-point array. TS devices with different cycle ratios (i.e., 3:1...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7281191/ https://ncbi.nlm.nih.gov/pubmed/32455725 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11050525 |
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