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Atomic Layer Deposition of ZnO on Mesoporous Silica: Insights into Growth Behavior of ZnO via In-Situ Thermogravimetric Analysis

ZnO is a remarkable material with many applications in electronics and catalysis. Atomic layer deposition (ALD) of ZnO on flat substrates is an industrially applied and well-known process. Various studies describe the growth of ZnO layers on flat substrates. However, the growth characteristics and r...

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Dettagli Bibliografici
Pubblicato in:Nanomaterials (Basel)
Autori principali: Ingale, Piyush, Knemeyer, Kristian, Piernavieja Hermida, Mar, Naumann d’Alnoncourt, Raoul, Thomas, Arne, Rosowski, Frank
Natura: Artigo
Lingua:Inglês
Pubblicazione: MDPI 2020
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC7279530/
https://ncbi.nlm.nih.gov/pubmed/32443853
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano10050981
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