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Silicon carbide zipper photonic crystal optomechanical cavities
We demonstrate a silicon carbide (SiC) zipper photonic crystal optomechanical cavity. The device is on a 3C–SiC-on-silicon platform and has a compact footprint of ∼30 × 1 μm. The device shows an optical quality of 2800 at telecom and a mechanical quality of 9700 at 12 MHz with an effective mass of ∼...
Shranjeno v:
| izdano v: | Appl Phys Lett |
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| Main Authors: | , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
AIP Publishing LLC
2020
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7272204/ https://ncbi.nlm.nih.gov/pubmed/32549586 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/5.0010078 |
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