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High-frequency and high-quality silicon carbide optomechanical microresonators

Silicon carbide (SiC) exhibits excellent material properties attractive for broad applications. We demonstrate the first SiC optomechanical microresonators that integrate high mechanical frequency, high mechanical quality, and high optical quality into a single device. The radial-breathing mechanica...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Lu, Xiyuan, Lee, Jonathan Y., Lin, Qiang
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group 2015
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4653626/
https://ncbi.nlm.nih.gov/pubmed/26585637
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep17005
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