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Generating Silicon Nanofiber Clusters from Grinding Sludge by Millisecond Pulsed Laser Irradiation
Silicon nanofiber clusters were successfully generated by the irradiation of millisecond pulsed laser light on silicon sludge disposed from wafer back-grinding processes. It was found that the size, intensity, and growing speed of the laser-induced plume varied with the gas pressure, while the size...
Zapisane w:
| Wydane w: | Nanomaterials (Basel) |
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| Główni autorzy: | , , , , , |
| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
MDPI
2020
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| Hasła przedmiotowe: | |
| Dostęp online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7221718/ https://ncbi.nlm.nih.gov/pubmed/32340381 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano10040812 |
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