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MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements
A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaph...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7218883/ https://ncbi.nlm.nih.gov/pubmed/32326548 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20082233 |
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