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Novel Fabrication Process for Integration of Microwave Sensors in Microfluidic Channels
This paper presents a novel fabrication process that allows integration of polydimethylsiloxane (PDMS)-based microfluidic channels and metal electrodes on a wafer with a micrometer-range alignment accuracy. This high level of alignment accuracy enables integration of microwave and microfluidic techn...
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| Pubblicato in: | Micromachines (Basel) |
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| Autori principali: | , , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2020
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7143474/ https://ncbi.nlm.nih.gov/pubmed/32204493 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11030320 |
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