Novel Fabrication Process for Integration of Microwave Sensors in Microfluidic Channels

This paper presents a novel fabrication process that allows integration of polydimethylsiloxane (PDMS)-based microfluidic channels and metal electrodes on a wafer with a micrometer-range alignment accuracy. This high level of alignment accuracy enables integration of microwave and microfluidic techn...

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Bibliografiska uppgifter
I publikationen:Micromachines (Basel)
Huvudupphovsmän: Bao, Juncheng, Markovic, Tomislav, Brancato, Luigi, Kil, Dries, Ocket, Ilja, Puers, Robert, Nauwelaers, Bart
Materialtyp: Artigo
Språk:Inglês
Publicerad: MDPI 2020
Ämnen:
Article
Länkar:https://ncbi.nlm.nih.gov/pmc/articles/PMC7143474/
https://ncbi.nlm.nih.gov/pubmed/32204493
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11030320
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