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Optical Detection Method for High Aspect Ratio Microstructures

High aspect ratio microstructures (HARMS) are of great importance for many application fields. Many defects are generated during the fabrication processes, especially in line microstructures, and it is necessary to examine the quality of the structures after each process. However, there is no suitab...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Wei, Wenbin, Hou, Shuangyue, Wu, Zhao, Hu, Yue, Wang, Yi, Chen, Lijuan, Xiong, Ying, Tian, Yangchao, Liu, Gang
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7142504/
https://ncbi.nlm.nih.gov/pubmed/32168956
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11030296
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