Cargando...
A New Method of Fixing High-Aspect-Ratio Microstructures by Gel
In the microfabrication processes, it is necessary to examine the quality of the structures to ensure the whole process runs smoothly. However, the examination process of pattern defects is interrupted during the fabrication of high-aspect-ratio microstructures. The inevitable pattern defects arise...
Guardado en:
| Publicado en: | Micromachines (Basel) |
|---|---|
| Autores principales: | , , , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI
2016
|
| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6189917/ https://ncbi.nlm.nih.gov/pubmed/30404288 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7070115 |
| Etiquetas: |
Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!
|