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A New Method of Fixing High-Aspect-Ratio Microstructures by Gel
In the microfabrication processes, it is necessary to examine the quality of the structures to ensure the whole process runs smoothly. However, the examination process of pattern defects is interrupted during the fabrication of high-aspect-ratio microstructures. The inevitable pattern defects arise...
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| Publicado no: | Micromachines (Basel) |
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| Main Authors: | , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6189917/ https://ncbi.nlm.nih.gov/pubmed/30404288 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7070115 |
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