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Dynamic optical response of SU-8 upon UV treatment

We report the optical properties of SU-8 in the mid-infrared (mid-IR) region before and after UV treatment. Samples consisted of SU-8 films of thickness ranging from 10 um to 157 um deposited on gold coated silicon substrates and were prepared using spin coating. Mid-IR diffuse reflectance measureme...

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Detalhes bibliográficos
Publicado no:Opt Mater Express
Main Authors: Ghanekar, Alok, Ricci, Matthew, Tian, Yanpei, Gregory, Otto, Zheng, Yi
Formato: Artigo
Idioma:Inglês
Publicado em: 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7141578/
https://ncbi.nlm.nih.gov/pubmed/32269865
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1364/ome.8.002017
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