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Dynamic optical response of SU-8 upon UV treatment
We report the optical properties of SU-8 in the mid-infrared (mid-IR) region before and after UV treatment. Samples consisted of SU-8 films of thickness ranging from 10 um to 157 um deposited on gold coated silicon substrates and were prepared using spin coating. Mid-IR diffuse reflectance measureme...
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| Veröffentlicht in: | Opt Mater Express |
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| Hauptverfasser: | , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7141578/ https://ncbi.nlm.nih.gov/pubmed/32269865 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1364/ome.8.002017 |
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