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Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication
Surface patterning technologies represent a worldwide growing industry, creating smart surfaces and micro/nanoscale device. The advent of large-area, high-speed imprinting technologies has created an ever-growing need for rapid and non-destructive dimensional metrology techniques to keep pace with t...
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| Publicado no: | Sci Rep |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7096422/ https://ncbi.nlm.nih.gov/pubmed/32214137 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-61975-3 |
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