Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficie...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Gablech, Imrich, Klempa, Jaroslav, Pekárek, Jan, Vyroubal, Petr, Hrabina, Jan, Holá, Miroslava, Kunz, Jan, Brodský, Jan, Neužil, Pavel
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2020
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Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7074684/
https://ncbi.nlm.nih.gov/pubmed/32012859
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11020143
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