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Simple and Efficient AlN-Based Piezoelectric Energy Harvesters
In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficie...
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| Publicado en: | Micromachines (Basel) |
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| Main Authors: | , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2020
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7074684/ https://ncbi.nlm.nih.gov/pubmed/32012859 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11020143 |
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