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Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force
An automatic mode-matching method for MEMS (Micro-electromechanical Systems) disk resonator gyroscopes (DRGs) based on virtual Coriolis force is presented in this paper. For this mode-matching method, the additional tuning electrodes are not required to be designed, which simplifies the structure de...
Wedi'i Gadw mewn:
| Cyhoeddwyd yn: | Micromachines (Basel) |
|---|---|
| Prif Awduron: | , , , , |
| Fformat: | Artigo |
| Iaith: | Inglês |
| Cyhoeddwyd: |
MDPI
2020
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| Pynciau: | |
| Mynediad Ar-lein: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7074587/ https://ncbi.nlm.nih.gov/pubmed/32085518 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11020210 |
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