Automatic Frequency Tuning Technology for Dual-Mass MEMS Gyroscope Based on a Quadrature Modulation Signal

In order to eliminate the frequency mismatch of MEMS (Microelectromechanical Systems) gyroscopes, this paper proposes a frequency tuning technology based on a quadrature modulation signal. A sinusoidal signal having a frequency greater the gyroscope operating bandwidth is applied to the quadrature s...

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Detalhes bibliográficos
Main Authors: Jia Jia, Xukai Ding, Yang Gao, Hongsheng Li
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2018-10-01
Colecção:Micromachines
Assuntos:
dual-mass MEMS gyroscope
frequency tuning
frequency split
quadrature modulation signal
frequency mismatch
Acesso em linha:http://www.mdpi.com/2072-666X/9/10/511
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