Assessing the Oxidative Degradation of N-Methylpyrrolidone (NMP) in Microelectronic Fabrication Processes by Using a Multiplatform Analytical Approach

During the construction of recording head devices, corrosion of metal features and subsequent deposition of corrosion by-products have been observed. Previous studies have determined that the use of N-methylpyrrolidone (NMP) may be a contributing factor. In this study, we report the use of a novel m...

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Detalhes bibliográficos
Publicado no:J Anal Methods Chem
Main Authors: Lennon, Gavin, Willox, Shannon, Ramdas, Ragini, Funston, Scott J., Klun, Matthew, Pieh, Robert, Fairlie, Stewart, Dobbin, Sara, Cobice, Diego F.
Formato: Artigo
Idioma:Inglês
Publicado em: Hindawi 2020
Assuntos:
Research Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7073504/
https://ncbi.nlm.nih.gov/pubmed/32190404
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1155/2020/8265054
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