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Ablation of piezoelectric polyvinylidene fluoride with a 193 nm excimer laser
The unique flexible and piezoelectric properties of polyvinylidene fluoride (PVDF) films would allow for new applications for integrated bioelectronic devices. The use of these films has been precluded by the difficulty in machining them into small, discrete features without damaging the properties...
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| Publicado no: | J Vac Sci Technol A |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Vacuum Society
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7065920/ https://ncbi.nlm.nih.gov/pubmed/32226219 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1116/1.5142494 |
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