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Ablation of piezoelectric polyvinylidene fluoride with a 193 nm excimer laser

The unique flexible and piezoelectric properties of polyvinylidene fluoride (PVDF) films would allow for new applications for integrated bioelectronic devices. The use of these films has been precluded by the difficulty in machining them into small, discrete features without damaging the properties...

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Bibliographische Detailangaben
Veröffentlicht in:J Vac Sci Technol A
Hauptverfasser: Elloian, Jeffrey, Sherman, Jeffrey, Costa, Tiago, Shi, Chen, Shepard, Kenneth
Format: Artigo
Sprache:Inglês
Veröffentlicht: American Vacuum Society 2020
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7065920/
https://ncbi.nlm.nih.gov/pubmed/32226219
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1116/1.5142494
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