Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers

We present passive, visible light silicon nitride waveguides fabricated on ≈ 100 µm thick 200 mm silicon wafers using deep ultraviolet lithography. The best-case propagation losses of single-mode waveguides were ≤ 2.8 dB/cm and ≤ 1.9 dB/cm over continuous wavelength ranges of 466-550 nm and 552-648...

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Detalhes bibliográficos
Publicado no:Opt Express
Main Authors: Sacher, Wesley D., Luo, Xianshu, Yang, Yisu, Chen, Fu-Der, Lordello, Thomas, Mak, Jason C. C., Liu, Xinyu, Hu, Ting, Xue, Tianyuan, Guo-Qiang Lo, Patrick, Roukes, Michael L., Poon, Joyce K. S.
Formato: Artigo
Idioma:Inglês
Publicado em: Optical Society of America 2019
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7046040/
https://ncbi.nlm.nih.gov/pubmed/31878521
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1364/OE.27.037400
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