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Porous Si-SiO(2) based UV Microcavities

Obtaining silicon-based photonic-structures in the ultraviolet range would expand the wavelength bandwidth of silicon technology, where it is normally forbidden. Herein, we fabricated porous silicon microcavities by electrochemical etching of alternating high and low refraction index layers; and wer...

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Bibliografski detalji
Izdano u:Sci Rep
Glavni autori: Jimenéz-Vivanco, María R., García, Godofredo, Carrillo, Jesús, Agarwal, Vivechana, Díaz-Becerril, Tomás, Doti, Rafael, Faubert, Jocelyn, Lugo, J. E.
Format: Artigo
Jezik:Inglês
Izdano: Nature Publishing Group UK 2020
Teme:
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC7010755/
https://ncbi.nlm.nih.gov/pubmed/32041997
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-59001-7
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