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Porous Si-SiO(2) based UV Microcavities

Obtaining silicon-based photonic-structures in the ultraviolet range would expand the wavelength bandwidth of silicon technology, where it is normally forbidden. Herein, we fabricated porous silicon microcavities by electrochemical etching of alternating high and low refraction index layers; and wer...

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Détails bibliographiques
Publié dans:Sci Rep
Auteurs principaux: Jimenéz-Vivanco, María R., García, Godofredo, Carrillo, Jesús, Agarwal, Vivechana, Díaz-Becerril, Tomás, Doti, Rafael, Faubert, Jocelyn, Lugo, J. E.
Format: Artigo
Langue:Inglês
Publié: Nature Publishing Group UK 2020
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC7010755/
https://ncbi.nlm.nih.gov/pubmed/32041997
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-59001-7
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