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Porous Si-SiO(2) based UV Microcavities
Obtaining silicon-based photonic-structures in the ultraviolet range would expand the wavelength bandwidth of silicon technology, where it is normally forbidden. Herein, we fabricated porous silicon microcavities by electrochemical etching of alternating high and low refraction index layers; and wer...
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| 出版年: | Sci Rep |
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| 主要な著者: | , , , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Nature Publishing Group UK
2020
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7010755/ https://ncbi.nlm.nih.gov/pubmed/32041997 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-59001-7 |
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