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Porous Si-SiO(2) based UV Microcavities
Obtaining silicon-based photonic-structures in the ultraviolet range would expand the wavelength bandwidth of silicon technology, where it is normally forbidden. Herein, we fabricated porous silicon microcavities by electrochemical etching of alternating high and low refraction index layers; and wer...
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| Publié dans: | Sci Rep |
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| Auteurs principaux: | , , , , , , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Nature Publishing Group UK
2020
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7010755/ https://ncbi.nlm.nih.gov/pubmed/32041997 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-59001-7 |
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