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Determination of the concentration of impurities in GaN from photoluminescence and secondary-ion mass spectrometry

Photoluminescence (PL) was used to estimate the concentration of carbon in GaN grown by hydride vapor phase epitaxy (HVPE). The PL data were compared with profiles of the impurities obtained from secondary ion mass spectrometry (SIMS) measurements. Comparison of PL and SIMS data has revealed that ap...

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書目詳細資料
發表在:Sci Rep
Main Authors: Reshchikov, M. A., Vorobiov, M., Andrieiev, O., Ding, K., Izyumskaya, N., Avrutin, V., Usikov, A., Helava, H., Makarov, Yu.
格式: Artigo
語言:Inglês
出版: Nature Publishing Group UK 2020
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在線閱讀:https://ncbi.nlm.nih.gov/pmc/articles/PMC7010669/
https://ncbi.nlm.nih.gov/pubmed/32041980
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-59033-z
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