A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers

The EM- [Formula: see text] (electromechanical sigma-delta) approach is a concise and efficient way to realize the digital interface for micro-electromechanical systems (MEMS) accelerometers. However, including a fixed MEMS element makes the synthesizing of the EM- [Formula: see text] loop an intric...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Chen, Dongliang, Yin, Liang, Fu, Qiang, Zhang, Wenbo, Wang, Yihang, Zhang, Guorui, Zhang, Yufeng, Liu, Xiaowei
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6982865/
https://ncbi.nlm.nih.gov/pubmed/31877890
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20010091
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