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A Digital Closed-Loop Sense MEMS Disk Resonator Gyroscope Circuit Design Based on Integrated Analog Front-end

A digital closed-loop system design of a microelectromechanical systems (MEMS) disk resonator gyroscope (DRG) is proposed in this paper. Vibration models with non-ideal factors are provided based on the structure characteristics and operation mode of the sensing element. The DRG operates in force ba...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Wang, Yihang, Fu, Qiang, Zhang, Yufeng, Zhang, Wenbo, Chen, Dongliang, Yin, Liang, Liu, Xiaowei
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7038481/
https://ncbi.nlm.nih.gov/pubmed/32012671
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20030687
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