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Analysis and Simulation of Forcing the Limits of Thermal Sensing for Microbolometers in CMOS–MEMS Technology

Room-temperature highly sensitive microbolometers are becoming very attractive in infrared (IR) sensing with the increase in demand for the internet of things (IOT), night vision, and medical imaging. Different techniques, such as building extremely small-scale devices (nanotubes, etc.) or using 2D...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Göktaş, Hasan, Gökhan, Fikri Serdar
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6915673/
https://ncbi.nlm.nih.gov/pubmed/31671784
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10110733
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