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Reliable Nanofabrication of Single-Crystal Diamond Photonic Nanostructures for Nanoscale Sensing

In this manuscript, we outline a reliable procedure to manufacture photonic nanostructures from single-crystal diamond (SCD). Photonic nanostructures, in our case SCD nanopillars on thin (<1 [Formula: see text] m) platforms, are highly relevant for nanoscale sensing. The presented top-down proced...

詳細記述

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書誌詳細
出版年:Micromachines (Basel)
主要な著者: Radtke, Mariusz, Nelz, Richard, Slablab, Abdallah, Neu, Elke
フォーマット: Artigo
言語:Inglês
出版事項: MDPI 2019
主題:
オンライン・アクセス:https://ncbi.nlm.nih.gov/pmc/articles/PMC6915366/
https://ncbi.nlm.nih.gov/pubmed/31653033
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10110718
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