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Reliable Nanofabrication of Single-Crystal Diamond Photonic Nanostructures for Nanoscale Sensing
In this manuscript, we outline a reliable procedure to manufacture photonic nanostructures from single-crystal diamond (SCD). Photonic nanostructures, in our case SCD nanopillars on thin (<1 [Formula: see text] m) platforms, are highly relevant for nanoscale sensing. The presented top-down proced...
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| Pubblicato in: | Micromachines (Basel) |
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| Autori principali: | , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2019
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6915366/ https://ncbi.nlm.nih.gov/pubmed/31653033 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10110718 |
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