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Data-driven approaches to optical patterned defect detection

Computer vision and classification methods have become increasingly wide-spread in recent years due to ever-increasing access to computation power. Advances in semiconductor devices are the basis for this growth, but few publications have probed the benefits of data-driven methods for improving a cr...

पूर्ण विवरण

में बचाया:
ग्रंथसूची विवरण
में प्रकाशित:OSA Contin
मुख्य लेखकों: Henn, Mark-Alexander, Zhou, Hui, Barnes, Bryan M.
स्वरूप: Artigo
भाषा:Inglês
प्रकाशित: 2019
विषय:
ऑनलाइन पहुंच:https://ncbi.nlm.nih.gov/pmc/articles/PMC6902446/
https://ncbi.nlm.nih.gov/pubmed/31825017
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1364/osac.2.002683
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