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Data-driven approaches to optical patterned defect detection
Computer vision and classification methods have become increasingly wide-spread in recent years due to ever-increasing access to computation power. Advances in semiconductor devices are the basis for this growth, but few publications have probed the benefits of data-driven methods for improving a cr...
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| Publicado no: | OSA Contin |
|---|---|
| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6902446/ https://ncbi.nlm.nih.gov/pubmed/31825017 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1364/osac.2.002683 |
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