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Gas-Source CVD Growth of Atomic Layered WS(2) from WF(6) and H(2)S Precursors with High Grain Size Uniformity
Two-dimensional (2D) transition-metal dichalcogenides have attracted a considerable amount of attention because of their potential for post-silicon device applications, as well as for exploring fundamental physics in an ideal 2D system. We tested the chemical vapour deposition (CVD) of WS(2) using t...
Shranjeno v:
| izdano v: | Sci Rep |
|---|---|
| Main Authors: | , , , , , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
Nature Publishing Group UK
2019
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6881408/ https://ncbi.nlm.nih.gov/pubmed/31776373 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-019-54049-6 |
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